November 25

Opening Session

Session Chair: Hidenori Kakinuma, Rapidus

13:00 - 13:05	Opening by the AEC/APC Symposium Asia 2025 Executive Committee Chair Hidetaka Nishimura Renesas Electronics
13:05 - 13:10	Program Outline by the AEC/APC Smposium Asia 2025 Program Committee Chair Shunichi Shibuki Sony Semiconductor Manufacturing
13:10 - 13:55	Tutorial 1 Mathematical and Information Technologies for the Realization and Industrial Applications of Cyber-Physical Systems Katsuki Fujisawa Institute of Integrated Research, Institute of Science Tokyo

Session 1

Session Co-Chairs: Hiroyuki Morinaga, KIOXIA / Akira Kagoshima, Hitachi High-Tech

13:55 - 14:15	DA-014 Improving Equipment Productivity through Text Analysis and RAG Takashi Iuchi Sony Semiconductor Manufacturing
14:15 - 14:35	DA-019 The Integration of Machine Learning and Equipment Knowledge: Two Approaches to Film Deposition Data Analysis Huizhen,Bu Tokyo Electron Technology Solutions
14:35 - 14:55	PTL-018 Using Machine Learning and Domain Knowledge to Improve PPC System Xueting Wang TOSHIBA ELECTRONIC DEVICES & STORAGE
14:55 - 15:15	PTL-012 Real-time Automated Recipe Creation & Verification of Single Wafer Wet Etching with Backcasting & Forecasting AIs Koki Shibata The University of Tokyo

15:15 - 15:45

Exhibiton and Break

Keynote speech 1

Session Co-Chair: Tsuyoshi Miyatake, Renesas Electronics

15:45 - 16:30

Keynote 1 Technological Trends of Power Semiconductor Modules Junji Yamada Mitsubishi Electric Corporation

Session 2

Session Chair: Tomoo Nakayama, Renesas Electronics / Hirofumi Tsuchiyama, INFICON

16:30 - 16:50	DA-017 Human-aided Relabeling and Outlier Sample Selection for Semiconductor Inspection Teguh Budianto Toshiba
16:50 - 17:10	DA-020 Semi-Automatic Critical Dimension Measurement Method in SEM Image with Critical Point Mapping Algorithm Takahiro Nakamura Tokyo Electron
17:10 - 17:30	DA-011 Graph-Based Clustering for Detection of Subtle Defect Patterns in High-Yield Semiconductor Wafer Maps Manami Yamagiwa Mie University
17:30 - 17:50	DA-016 Detection and Localization of Defects Using Masked Image Modeling Akira Yasuda University of Tsukuba
17:50 - 18:20	Authors' Interview for Session 1 & 2

Poster Session (TBD)

18:20 - 20:20

Reception/Exhibition Hidetaka Nishimura, Renesas Electronics

November 26

9:00 - 9:05

Program Outline of Day 2 Shunichi Shibuki, Sony Semiconductor Manufacturing

Keynote speech 2

Session Chair: Toshiya Hirai, Rapidus

9:05 - 9:50

Keynote 2 CIM system to realize an ultimate automation at advanced semiconductor manufacturing Ryuichiro Hattori Rapidus Corporation

Session 3

Session Co-Chairs: Hisato Tanaka, Tokyo Electron / Tomoya Tanaka, Tower Partners Semiconductor

9:50 - 10:10	YM-023 Building an Engineering Automation System Using Generative AI and Agentic AI Hyukjun Na Aydentyx
10:10 - 10:30	PTL-015 From Detection to Diagnosis: Enhancing SPC with AI-Powered Root Cause Analysis Vishali Ragam Applied Materials
10:30 - 10:50	FAB-010 A Novel Chamber Level Smart Sampling Approach in Semiconductor Manufacturing Yan-Qiu Zhang Fujian Jinhua Integrated Circuit Co., Ltd
10:50 - 11:10	TBA
11:10 - 11:40	Authors' Interview for Session 3 /Exhibition

Tutorial speech 2

Session Chair: Kazutaka Nagashima, Toshiba Electronic Devices & Storage

11:40 - 12:25

Tutorial 2 Process Informatics in Semiconductor Manufacturing Hironori Moki Tokyo Electron Ltd.

12:25 - 13:20

Lunch time/Exhibition

Keynote speech 3

Session Chair: Kenji Miyake, Office Miyake

13:20 - 14:05

Keynote 3 Back-End Technologies for Diversified Semiconductors - Power & CIS Shinji Baba Amkor Technology Japan, Inc.

Session 4

Session Co-Chairs: Koichi Tateishi, Azbil / Osamu Ohishi, IBM Japan Digital Services Company

14:05 - 14:25	SN-022 Practical Use Case of AI/ML at the Edge for Run-by-Run and Real-Time Charlie Sowerby INFICON
14:25 - 14:45	VM-013 Model-based liquid precursor supply for baking vaporization module Daisuke Hayashi HORIBA STEC, Co., Ltd.
14:45 - 15:05	YM-021 Yield Enhancement activity for small-volume CIS product in Foundry Takatoshi Yasui Tower Partners Semiconductor
15:05 - 15:30	Authors' Interview for Session 4 /Exhibition

15:30 - 15:40	Award Ceremony Shunichi Shibuki Sony Semiconductor Manufacturing
15:40 - 15:45	Closing Hidetaka Nishimura Renesas Electronics