Call for paper

CFP English Version
CFP 日本語版
Abstract Template

Scope of the Symposium

This call for paper is distributed to everyone associated with the process industry. We look forward to the posting as well as pre-process of semiconductor device manufacturers, and post-processing, equipment manufacturers who are heavily involved in process industry contents such as LCD and PV, software vendors, many of who are engaged in sensor and metrology supplier. Why don’t you join us having solid argument precisely because being age of rapid and dramatic change?

Important Dates

Abstract Submission Start: Monday, May 16, 2011
Abstract Submission Due: Friday, July 15, 2011
Notification of Acceptance: Friday, August 26, 2011
Selected Final Presentation Due: Friday, October 14, 2011

Areas of Interest

The symposium will be built around sessions such as (but not limited to) the following areas:

  1. Equipment and Process Fault Detection, Classification and Prediction
  2. Data Management and Process Control
  3. Metrology, Sensors, and Analytics
  4. Soft Sensor, Virtual Metrology
  5. Fab-wide AEC, APC, YM and Multi-fab Approaches
  6. Standard and Roadmaps
  7. Future Needs and Proposals

Online Submission

Additional Details for the Areas of Interest

Topics on Contents related to processes and equipments

Equipment and Process control methodology:
Productivity & tool optimizations:
Model based process control:
Tool data analysis:

TOPICS ON FAB LEVEL

Data analysis, modeling and visualization:
Control methods:
Benefit of APC application:
APC Integration:
IT infra structure for APC:
APC strategy: