Supplier Exhibition

Supplier Exhibition will be placed in the Chu-kaigijo adjacent to the technical session meeting room. This symposium provides an interactive venue for the AEC/APC community to share experiences, exchange ideas, and discuss the latest technology requirements in the ever-expanding area of advanced equipment and process control.

-Exhibitors List
-Exhibitors Description
-Supplier Exhibition Booth Layout

Exhibitors List
Exhibit's Description
AP Systems Title : Real Time Process Diagnosis and Equipment Efficiency Improvement System based on EDA and Local EES
Summary: "Local EES" has been introduced for providing benefits of EES at the equipment level. Local EES can gather various tool data and sensor data as well. By using IT technology, it can provide real-time monitoring and data analysis. The basic functionalities of Local EES are FDC, DCP, SPC, and EPT which is for improve equipment efficiency. PM management module, APC (R2R), and Rap will be available in the future
BISTel, Inc. BISTel is committed to providing efficient software to make a semiconductor and FPD's manufacturer the maximum valued, founded on August, 2000. We are now well into growth and development of efficient equipment, known as a market leader in Korea. Our efforts came to be recognized through successful establishment and management, striving to give suitable solution. BISTel strives to give customers a better value to strengthen international competitiveness for IT technology and facilities' know-how. Furthermore, we are preoccupied with cost reduction and the maximum value of production by specialized solution. A system that provides an integrated environment to develop and operate various EES applications is required in semiconductor and FPD/LCD industries. This system should be a domain specific system which cuts down the cost of EES applications through reusability and decreases time-to-market by reducing development time. PeakPerformance? Framework is a domain specific EES framework for semiconductor and FPD/LCD industries. PeakPerformance? Framework has been developed and equipped with latest IT technologies, and it provides the infrastructure for reliable, flexible and extensible application development via data access service, log service, connectivity service, API service and so on.
INFICON Co Ltd NOW FABGUARD FDC TAKES YOU FAR BEYOND SPC
FabGuard FDC combines on-line fault detection and classification with powerful tools that allow fab engineers to readily analyze virtually any aspect of process and equipment behavior. No other system provides greater capability to guard against wafer loss, reduce unscheduled tool downtime and improve yield.
Escalating pressure to reduce costs makes it critical to reduce the number of scrapped wafers and increase equipment utilization. These challenges are met by one FabGuard FDC system that integrates data from all tool and in-situ sensors, and then analyzes it with your teamfs collective expertise, so you can maintain fab productivity at cutting-edge levels.
REDEFINING FDC: FABGUARD DETECTION AND CLASSIFICATIONFabGuard FDC enables FDC engineering at all levels-from detailed, hands-on, chamber-specific knowledge to fab wide statistical process control.
Please come our booth to discuss about FabGuard and in-situ sensors in details.
Kyushu Semiconductor Industries & Technology Innovation Association (SIIQ) We, Kyushu Semiconductor Industries & Technology Innovation Association (SIIQ) were established in 2002 as an organization to promote a project for creating new businesses in the semiconductor field, called the "Kyushu Silicon Cluster Project". This Project is one of the industrial cluster projects promoted by the Ministry of Economy, Trade and Industry and its Kyushu Bureau. (Chairman of SIIQ: Hajime Sasaki, Special Advisor to NEC Corporation / Number of our member organizations: approx. 220)
Since our establishment, we have made our best efforts to provide our member companies with support for businesses, research and development, network formation and next-generation human resources development, and have successfully achieved excellent results.
We will make every effort to provide business support to our member companies in the future as well, under the slogans of "Developping human resources," "Encouraging business alliances," "Enhancing technology" and "Creating new businesses".
Come and visit our booth
Yamatake Corporation To keep you winning in an ever more competitive environment, Yamatake (a member of the azbil Group), a world leader in the process industries, offers complete process management, encompassing all aspects of sensing and control.
OEE Improvement / Reduction of Carbon Footprint
  • Orchard-TequiraTM EES data analysis system
  • Hercules(R) real-time plasma process monitoring system
  • Compact, highly accurate, corrosion-resistant sapphire pressure sensors with extremely long product life
  • NX modular controller, setting a new standard for intelligent distributed control and energy conservation
  • Leak detectors for acids, bases, DI water, coolant, IPA and other alcohols
  • Image sensors for instant, accurate detection of misaligned wafers
  • Mass flow sensors and controllers built around the unique µF Sensor, for fast response and wide rangeability
YDC Corporation YDC Corp. have been provided quality data warehouse "YDC SONAR".
In AEC/APC symposium, we will introduce new solution "MSPC platform" as equipment management solution.
MSPC platform calculate tool health from equipment data by using multivariate analysis, and detect equipment abnormality.
To detect the equipment abnormality, user need to define normal status of equipment in advance.
MSPC platform can easily define this normal condition form equipment data and quality data from SONAR.
In addition, user can generate and reuse data analysis flow by "data analysis template", this will reduce engineering resource.
Please make a brief stop our booth, we can show demo of this new solution!
Supplier Exhibition Booth Layout
Supplier Exhibition Booth Layout