| Co-Chairs |
Masafumi Shishino |
Panasonic Corporation |
| Hidenori Kakinuma |
Toshiba Corporation |
| Vice-Chair |
Sumika Arima |
University of Tsukuba |
| Members |
Eiichi Kawamura |
Fujitsu Microelectronics Limited |
| Kenji Miyake |
GEN Co. Ltd. |
| Hiromichi Enami |
Hitachi High-Technologies Corporation |
| Ryuhji Tamehiro |
IBM Japan Services Company Ltd. |
| Shingo Terakado |
KLA-Tencor Japan Ltd. |
| Shin-ichi Imai |
Panasonic Corporation |
| Yoshio Iwata |
Renesas Technology Corp. |
| Toshiya Hirai |
Sony Semiconductor Kyushu Corporation |
| Koichi Sakamoto |
Tokyo Electron Ltd. |
| Takashi Yokota |
Tokyo Electron Software Technologies Ltd. |
| Yuki Takayama |
Yamatake Corporation |