Opening & Tutorial 1 Speech

Session chair : Hirai Toshiya, KOKUSAI ELECTRIC

9:45	Opening Remarks from AEC/APC Asia Hidetaka Nishimura Renesas Electronics
9:50	Program Outline Hidenori Kakinuma Kioxia Corporation
9:55	Tutorial-1 [ ONLINE ] Practical molecular, material and process design and process control with artificial intelligence and machine learning Hiromasa Kaneko Meiji University

Session 1

Session chair : Hisato Tanaka, Tokyo Electron / Takashi Kurosawa, Azbil

10:40	GX-018 [ ONLINE ] Smart Subfab Transformation using Context-Based Control Holland Smith INFICON View Abstract
11:00	PTL-013 Unified Platform for detecting faults governed by Process Controls Vishali Ragam Applied Materials View Abstract
11:20	DA-016 Mixed-type Defect Pattern Classifications Takumi Maeda University of Tsukuba View Abstract
11:40	YM-009 Defective Wafer Map Classification for Unknown Patterns Using Image Generation Model Seima Sakaguchi Mie University View Abstract

12:00

Lunch Break & Supplier Exhibition

Keynote Speech

Session chair : Hidenori Kakinuma, Kioxia

13:00

Keynote The Future of Computing - Bits/Neurons/Qubits - Shintaro Yamamichi IBM Research -Tokyo, IBM Japan

Session 2

Session chair : Takahiro Tsuchiya, United Semiconductor Japan / Tomoya Tanaka, Tower Partners Semiconductor

13:45	PTL-007 Machine Learning Based Virtual Metrology for Effective Process Control in High Product Mix Manufacturing Hyung Joo Lee Siemens EDA View Abstract
14:05	PTL-019 RF sensing method to detect low open area end point Chuhua Song INFICON View Abstract
14:25	PTL-008 Comparison of Numerical Method with Prefixed Profile and Machine Learning-based Method for Wet Etching Amount Prediction Chihiro Matsui The University of Tokyo View Abstract
14:45	DA-012 Population estimation of characteristic variation and its application to circuit simulation for power transistors Haruka Fukumoto ROHM Co.,Ltd View Abstract
15:05	DA-017 Prediction of Defect Rate Using Machine Learning in Assembly Process Yumiko Miyaji Sony Semiconductor Manufacturing View Abstract

15:25

Supplier Exhibition / Coffee Break

Tutorial 2 Speech

Session chair : Kenji Miyake, Office Miyake

15:45

Tutorial-2 Chiplet Integration Technology Yoichiro Kurita Tokyo Institute of Technology

Session 3

Session chair : Hirofumi Tsuchiyama, INFICON / Shunichi Shibuki, Sony Semiconductor Manufacturing

16:30	DA-011 Intelligent motor valve with failure prediction feature Hiroyuki Kawazato Shinwa Controls Co.,Ltd. View Abstract
16:50	MEP-010 Development of Versatile Fault Detection Using Image Sensors Takuya Sugiura Renesas Electronics View Abstract
17:10	DA-014 Anomaly detection of semiconductor manufacturing equipment by cluster analysis Yuki Shiga KOKUSAI ELECTRIC CORPORATION View Abstract
17:30	PTL-015 Root Cause Analysis of Plasma Processes Perturbation using Optical Emission Spectroscopy Signals with Modified Autoencoder Jaehyeon Kim Sungkyunkwan Univ. View Abstract

Author�fs Interview / Supplier Exhibition / Reception & Awards

Session chair : Koichi Sakamoto, Tokyo Electron

18:00	Author's Interview
18:30	Reception & Supplier Exhibition
19:20	Best Paper & Student Award